Organization Co-Directors


Farrokh Ayazi
Farrokh Ayazi

His research interests are in the areas of integrated micro- and nano-electromechanical resonators, inertial sensors, and interface IC design for MEMS and sensors. Dr. Ayazi is an editor for the IEEE Journal of Micro-Electro-Mechanical Systems, and the IEEE Transactions on Electron Devices. He was the chairman of the Display, Sensors and MEMS (DSM) sub-committee at the IEEE International Electron Devices Meeting (IEDM 2011). He will be the general co-chair of the IEEE Micro-Electro-Mechanical- Systems (MEMS) conference in 2014.


Mark G. Allen
Mark G. Allen

His main research focus is in microelectromechanical systems (MEMS), which uses microfabrication techniques to create mechanical structures in silicon and other materials that can be added to electronic devices. A key participant in the Microelectronics Research Center and the Microsystems Packaging Research Center, Dr. Allen also serves as a co-director for the Center for MEMS and Microsystems Technologies. He leads the Microsensor and Microactuator Group at Georgia Tech, where he has advised 17 postdoctoral fellows and has graduated 27 Ph.D. students.


Oliver Brand
Oliver Brand

He has co-authored more than 120 publications in scientific journals and conference proceedings. His research interests are in the areas of CMOS-based microsystems, microsensors, MEMS fabrication technologies, and microsystem packaging.